The ADXRS300 is a 300 deg/sec angular rate sensor (gyroscope) on a single chip, complete with all of the required electronics.
Two polysilicon sensing structures each contain a dither frame which is electrostatically driven to resonance.
A rotation about the z axis, normal to the plane of the chip,
produces a Coriolis force which displaces the sensing structures perpendicular to the vibratory motion.
This Coriolis motion is detected by a series of capacitive pickoff structures on the edges of the sensing structures.
The resulting signal is amplified and demodulated to produce the rate signal output.
The device is the only commercially available gyro to integrate a digitally controlled, full self-test feature that can be
operated while the sensor is active. It includes a temperature sensor for easy-to-implement temperature coefficient calibration.
• Complete rate gyroscope on a single chip
• Z-axis (yaw rate) response
• High vibration rejection over wide frequency
• 2000 g powered shock operation
• Temperature sensor output
• Absolute rate output for precision applications